7.7 MOSFET fabrication technology

Table of Contents - 1 2 3 4 5 6 7 8 9 R S
In this Chapter:
  1. Metal gate technology
  2. Poly-silicon gate technology/silicides
    1. Self-aligned source and drain regions
    2. Sidewalls
    3. Low-doped-drain MOSFETs (LDD)
    4. Silicides
    5. Self-aligned silicides
  3. Power MOSFETs
    1. VMOS
    2. UMOS
    3. DMOS
© Bart J. Van Zeghbroeck, 1996, 1997